Total depth after etching is 9.147 um
Calculated remaining resist as 8.25um, indicating an erosion of 0.49um in 10 minutes of etching
This equates to an erosion rate of 49 nm/min
The etch depth of 0.90um in 10 mins indicates an etch rate of 90.0nm/min
The selectivity is therefore 1.82:1